Filmetrics Optical
Profilometer measures thin film properties using the Spectral Reflectance
technique. Spectral reflectance measures the amount of light reflected from
a thin film over a range of wavelengths, with the incident light perpendicular
to the sample surface. It can measure the thickness, roughness, and optical
constants of a film by measuring how the films interact with light. Optical
constants describe how light propagates through and reflects from a material.
Once the optical constants are measured they may be related to other material
parameters, such as composition and band gap. This method is nondestructive,
and require little or no sample preparation but has a limitation of measuring
only less complex structures. For more detailed measurements Ellipsometry
is the most suitable method.
