Veeco
Dektak Stylus Profilometer:
The stylus profilometer
uses a diamond tipped stylus to scan across the sample surface and measures
the surface topography of thin and thick films. The vertical movements of
the stylus is measured and recorded simultaneously during the scanning, which
reveals the topographical structure of the surface. The instrument has vertical
resolution in nanometers and horizontal resolution as small as twenty nanometers
and measures the film thicknesses from 5 nm and over 500 µm.
