Variable Angle
Spectroscopic Ellipsometer is an excellent tool to measure thin film thickness
and its refractive index. The instrument shines linearly polarized light on
the sample surface and the ellipticity of the reflected light from the sample
surface is analyzed for the s-polarized and p-polarized components of the
light. Since it measures the ratio of the s and p polarized light the data
is very accurate. The data is measured over the entire wavelength range and
compared to a mathematically generated model to obtain film thickness and
refractive index etc. This instrument can work in the visible range of the
spectrum (250-850 nm) as well as in the NIR (850-2500 nm) region. Since it
is spectroscopic ellipsometry multi layered films could be analyzed accurately.
